Inventor
YARITA SATORU
JP15 patents
Patents
15 patentsUS10876082B2Dec 29, 2020
Surface treatment composition, method for producing surface treatment composition, surface treatment method, and method for producing semiconductor substrate
FUJIMI INC2 citations71
US10478939B2Nov 19, 2019
Polishing method
FUJIMI INC2 citations71
US11447660B2Sep 20, 2022
Polishing composition
FUJIMI INC0 citations60
US11384256B2Jul 12, 2022
Polishing method and method for manufacturing semiconductor substrate
FUJIMI INC0 citations60
US10907073B2Feb 2, 2021
Polishing composition
FUJIMI INC0 citations60
US11692137B2Jul 4, 2023
Intermediate raw material, and polishing composition and composition for surface treatment using the same
FUJIMI INC0 citations59
US11162057B2Nov 2, 2021
Composition for surface treatment, method for producing composition for surface treatment, surface treatment method, and method for producing semiconductor substrate
FUJIMI INC0 citations59
US9816010B2Nov 14, 2017
Polishing composition
FUJIMI INC0 citations48
US9238755B2Jan 19, 2016
Polishing composition
FUJIMI INC0 citations48
US11643573B2May 9, 2023
Polishing composition, production method therefor, and polishing method and production method for substrate, using polishing composition
FUJIMI INC0 citations47
US11377627B2Jul 5, 2022
Composition for surface treatment, method for producing the same, and surface treatment method using the same
FUJIMI INC0 citations47
US9376594B2Jun 28, 2016
Polishing composition
FUJIMI INC0 citations47
US9834703B2Dec 5, 2017
Polishing composition
FUJIMI INC0 citations38
US10858615B2Dec 8, 2020
Surface treatment composition, preparation method thereof, surface treatment method using the same
FUJIMI INC0 citations37
US9688884B2Jun 27, 2017
Polishing composition
FUJIMI INC0 citations37