Inventor
BROWN KARL
US29 patents
⚠️ This page may combine multiple inventors who share the name “BROWN KARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS7480129B2Jan 20, 2009
Detachable electrostatic chuck for supporting a substrate in a process chamber
APPLIED MATERIALS INC87 citations97
US6837968B2Jan 4, 2005
Lower pedestal shield
APPLIED MATERIALS INC40 citations96
US6726805B2Apr 27, 2004
Pedestal with integral shield
APPLIED MATERIALS INC56 citations96
US6652713B2Nov 25, 2003
Pedestal with integral shield
APPLIED MATERIALS INC47 citations96
US7907384B2Mar 15, 2011
Detachable electrostatic chuck for supporting a substrate in a process chamber
APPLIED MATERIALS INC13 citations92
US7697260B2Apr 13, 2010
Detachable electrostatic chuck
APPLIED MATERIALS INC35 citations92
US7252737B2Aug 7, 2007
Pedestal with integral shield
APPLIED MATERIALS INC22 citations92
US6563686B2May 13, 2003
Pedestal assembly with enhanced thermal conductivity
APPLIED MATERIALS INC41 citations92
US6104595AAug 15, 2000
Method and apparatus for discharging an electrostatic chuck
APPLIED MATERIALS INC27 citations92
US5948986ASep 7, 1999
Monitoring of wafer presence and position in semiconductor processing operations
APPLIED MATERIALS INC46 citations92
US6620296B2Sep 16, 2003
Target sidewall design to reduce particle generation during magnetron sputtering
APPLIED MATERIALS INC38 citations89
US6567257B2May 20, 2003
Method and apparatus for conditioning an electrostatic chuck
APPLIED MATERIALS INC15 citations84
US6214413B1Apr 10, 2001
Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck
APPLIED MATERIALS INC7 citations74
US7513971B2Apr 7, 2009
Flat style coil for improved precision etch uniformity
APPLIED MATERIALS INC5 citations63
US6875927B2Apr 5, 2005
High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications
APPLIED MATERIALS INC4 citations60
BROWN KARL
3 patentsQUANTUMSCAPE CORP
3 patentsUS9692039B2Jun 27, 2017
Nanostructured materials for electrochemical conversion reactions
QUANTUMSCAPE CORP6 citations84
US9640793B2May 2, 2017
Nanostructured materials for electrochemical conversion reactions
QUANTUMSCAPE CORP8 citations84
US9246158B2Jan 26, 2016
Nanostructured materials for electrochemical conversion reactions
QUANTUMSCAPE CORP8 citations84