Inventor
KIM GON-JUN
KR7 patents
⚠️ This page may combine multiple inventors who share the name “KIM GON-JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS9966274B2May 8, 2018
Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method
SAMSUNG ELECTRONICS CO LTD4 citations70
US11569065B2Jan 31, 2023
Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations69
US12456603B2Oct 28, 2025
Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations57
US9105581B2Aug 11, 2015
Method of processing a substrate and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD3 citations57
US9865474B2Jan 9, 2018
Etching method using plasma, and method of fabricating semiconductor device including the etching method
SAMSUNG ELECTRONICS CO LTD0 citations48
US10418250B2Sep 17, 2019
Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method
SAMSUNG ELECTRONICS CO LTD0 citations47