Inventor
UDAYAKUMAR KEZHAKKEDATH R
US23 patents
⚠️ This page may combine multiple inventors who share the name “UDAYAKUMAR KEZHAKKEDATH R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
17 patentsUS7935543B2May 3, 2011
Method of forming PZT ferroelectric capacitors for integrated circuits
TEXAS INSTRUMENTS INC20 citations92
US7304881B2Dec 4, 2007
Ferroelectric memory with wide operating voltage and multi-bit storage per cell
TEXAS INSTRUMENTS INC22 citations92
US7220600B2May 22, 2007
Ferroelectric capacitor stack etch cleaning methods
TEXAS INSTRUMENTS INC35 citations92
US7425512B2Sep 16, 2008
Method for etching a substrate and a device formed using the method
TEXAS INSTRUMENTS INC9 citations81
US8723241B2May 13, 2014
MEMS device fabricated with integrated circuit
TEXAS INSTRUMENTS INC4 citations73
US7085150B2Aug 1, 2006
Methods for enhancing performance of ferroelectic memory with polarization treatment
TEXAS INSTRUMENTS INC7 citations73
US9704804B1Jul 11, 2017
Oxidation resistant barrier metal process for semiconductor devices
TEXAS INSTRUMENTS INC4 citations68
US8778700B2Jul 15, 2014
Hydrogen barrier for ferroelectric capacitors
TEXAS INSTRUMENTS INC1 citations62
US7799582B2Sep 21, 2010
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean
TEXAS INSTRUMENTS INC1 citations62
US7985603B2Jul 26, 2011
Ferroelectric capacitor manufacturing process
TEXAS INSTRUMENTS INC4 citations61
US7772014B2Aug 10, 2010
Semiconductor device having reduced single bit fails and a method of manufacture thereof
TEXAS INSTRUMENTS INC6 citations56
US8053252B2Nov 8, 2011
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean
TEXAS INSTRUMENTS INC0 citations52
US7572698B2Aug 11, 2009
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean
TEXAS INSTRUMENTS INC0 citations52
US9548377B2Jan 17, 2017
Thermal treatment for reducing transistor performance variation in ferroelectric memories
TEXAS INSTRUMENTS INC0 citations51
US7723199B2May 25, 2010
Method for cleaning post-etch noble metal residues
TEXAS INSTRUMENTS INC0 citations51
US10665543B2May 26, 2020
Oxidation resistant barrier metal process for semiconductor devices
TEXAS INSTRUMENTS INC0 citations47
US10008450B2Jun 26, 2018
Oxidation resistant barrier metal process for semiconductor devices
TEXAS INSTRUMENTS INC0 citations47
UDAYAKUMAR KEZHAKKEDATH R
3 patentsUS8440508B2May 14, 2013
Hydrogen barrier for ferroelectric capacitors
UDAYAKUMAR KEZHAKKEDATH R32 citations91
US8496842B2Jul 30, 2013
MEMS device fabricated with integrated circuit
UDAYAKUMAR KEZHAKKEDATH R11 citations82
US8779485B2Jul 15, 2014
Hydrogen barrier for ferroelectric capacitors
UDAYAKUMAR KEZHAKKEDATH R0 citations50