Inventor
XIONG FULIN
US7 patents
Patents
7 patentsUS7952786B2May 31, 2011
Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
MIRADIA INC14 citations92
US7471439B2Dec 30, 2008
Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
MIRADIA INC19 citations92
US7463404B2Dec 9, 2008
Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
MIRADIA INC20 citations92
US7372615B2May 13, 2008
Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
MIRADIA INC19 citations92
US7616370B2Nov 10, 2009
Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
MIRADIA INC25 citations91
US7723812B2May 25, 2010
Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
MIRADIA INC18 citations83
US7580174B2Aug 25, 2009
Anti-stiction gas-phase lubricant for micromechanical systems
MIRADIA INC16 citations83