Inventor
LO YI-CHUAN
TW13 patents
⚠️ This page may combine multiple inventors who share the name “LO YI-CHUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
6 patentsUS6043864AMar 28, 2000
Alignment method and apparatus using previous layer calculation data to solve critical alignment problems
TAIWAN SEMICONDUCTOR MFG22 citations92
US6898471B1May 24, 2005
Multivariate RBR tool aging adjuster
TAIWAN SEMICONDUCTOR MFG12 citations75
US6723168B2Apr 20, 2004
Spin-coater with self-cleaning cup and method of using
TAIWAN SEMICONDUCTOR MFG11 citations72
US6865438B1Mar 8, 2005
Method of using time interval in IC foundry to control feed back system
TAIWAN SEMICONDUCTOR MFG4 citations59
US6893882B2May 17, 2005
Multivariate RBR tool aging detector
TAIWAN SEMICONDUCTOR MFG2 citations55
US7687211B2Mar 30, 2010
System and method for photolithography in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG1 citations49
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS11804374B2Oct 31, 2023
Strain relief trenches for epitaxial growth
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11085849B2Aug 10, 2021
Optical test system and method for determining size of gap between two substrates of optical element
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10508971B2Dec 17, 2019
Optical test system and method for determining size of gap between two substrates of optical element
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US10649336B2May 12, 2020
Method and system for fabricating semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations33