Inventor
WIDMANN AMIR
IL19 patents
⚠️ This page may combine multiple inventors who share the name “WIDMANN AMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS9170209B1Oct 27, 2015
Inspection guided overlay metrology
KLA TENCOR CORP11 citations84
US9329033B2May 3, 2016
Method for estimating and correcting misregistration target inaccuracy
KLA TENCOR CORP8 citations82
US8948495B2Feb 3, 2015
Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer
KLA TENCOR CORP8 citations81
US10649447B2May 12, 2020
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
KLA TENCOR CORP2 citations72
US9576861B2Feb 21, 2017
Method and system for universal target based inspection and metrology
KLA TENCOR CORP2 citations72
KLA TENCOR TECH CORP
4 patentsUS7561282B1Jul 14, 2009
Techniques for determining overlay and critical dimension using a single metrology tool
KLA TENCOR TECH CORP48 citations92
US7925486B2Apr 12, 2011
Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout
KLA TENCOR TECH CORP16 citations79
US7679069B2Mar 16, 2010
Method and system for optimizing alignment performance in a fleet of exposure tools
KLA TENCOR TECH CORP2 citations61
US8045786B2Oct 25, 2011
Waferless recipe optimization
KLA TENCOR TECH CORP5 citations57
IZIKSON PAVEL
2 patentsUS8175831B2May 8, 2012
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
IZIKSON PAVEL42 citations95
US9651943B2May 16, 2017
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
IZIKSON PAVEL1 citations60