Inventor
HORIUCHI JUNYA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “HORIUCHI JUNYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI GAS CHEMICAL CO
4 patentsUS10364314B2Jul 30, 2019
Compound, resin, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, and purification method
MITSUBISHI GAS CHEMICAL CO2 citations70
US11747728B2Sep 5, 2023
Compound, resin, composition, resist pattern formation method, circuit pattern formation method and method for purifying resin
MITSUBISHI GAS CHEMICAL CO0 citations60
US10577323B2Mar 3, 2020
Compound, resin, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, pattern forming method, and method for purifying compound or resin
MITSUBISHI GAS CHEMICAL CO1 citations59
US12134596B2Nov 5, 2024
Compound, resin, composition, resist pattern formation method, circuit pattern formation method and method for purifying resin
MITSUBISHI GAS CHEMICAL CO0 citations50