Inventor
CUI ANQING
US11 patents
⚠️ This page may combine multiple inventors who share the name “CUI ANQING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6617553B2Sep 9, 2003
Multi-zone resistive heater
APPLIED MATERIALS INC59 citations95
US11715667B2Aug 1, 2023
Thermal process chamber lid with backside pumping
APPLIED MATERIALS INC5 citations85
US10407771B2Sep 10, 2019
Atomic layer deposition chamber with thermal lid
APPLIED MATERIALS INC12 citations81
US11335591B2May 17, 2022
Thermal process chamber lid with backside pumping
APPLIED MATERIALS INC2 citations72
US12387975B2Aug 12, 2025
Thermal process chamber lid with backside pumping
APPLIED MATERIALS INC0 citations62
US12054826B2Aug 6, 2024
ALD cycle time reduction using process chamber lid with tunable pumping
APPLIED MATERIALS INC0 citations50
US11767590B2Sep 26, 2023
ALD cycle time reduction using process chamber lid with tunable pumping
APPLIED MATERIALS INC0 citations50