Inventor
GUO YUANHONG
US9 patents
Patents
9 patentsUS11555250B2Jan 17, 2023
Organic contamination free surface machining
APPLIED MATERIALS INC2 citations67
US9925639B2Mar 27, 2018
Cleaning of chamber components with solid carbon dioxide particles
APPLIED MATERIALS INC2 citations67
US11735420B2Aug 22, 2023
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC0 citations62
US10770292B2Sep 8, 2020
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC1 citations62
US12249494B2Mar 11, 2025
Remote plasma cleaning of chambers for electronics manufacturing systems
APPLIED MATERIALS INC0 citations59
US11854773B2Dec 26, 2023
Remote plasma cleaning of chambers for electronics manufacturing systems
APPLIED MATERIALS INC0 citations59
US11932950B2Mar 19, 2024
Organic contamination free surface machining
APPLIED MATERIALS INC0 citations56
US12523380B2Jan 13, 2026
Prevention of contamination of substrates during pressure changes in processing systems
APPLIED MATERIALS INC0 citations54
US11508610B2Nov 22, 2022
Substrate support with edge seal
APPLIED MATERIALS INC0 citations47