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Inventor
MURAISHI SHUICHI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “MURAISHI SHUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JEOL LTD
1 patent
US6545755B1
Apr 8, 2003
Micro-Raman spectroscopy system for identifying foreign material on a semiconductor wafer
JEOL LTD
34 citations
85
FUJITSU LTD
1 patent
US5066599A
Nov 19, 1991
Silicon crystal oxygen evaluation method using fourier transform infrared spectroscopy (ftir) and semiconductor device fabrication method using the same
FUJITSU LTD
15 citations
69