Inventor
TSUKAMOTO KIWAMU
JP19 patents
⚠️ This page may combine multiple inventors who share the name “TSUKAMOTO KIWAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
17 patentsUS5728223AMar 17, 1998
Reactant gas ejector head and thin-film vapor deposition apparatus
EBARA CORP674 citations99
US6176929B1Jan 23, 2001
Thin-film deposition apparatus
EBARA CORP340 citations98
US5950925ASep 14, 1999
Reactant gas ejector head
EBARA CORP697 citations98
US6387182B1May 14, 2002
Apparatus and method for processing substrate
EBARA CORP113 citations97
US5935337AAug 10, 1999
Thin-film vapor deposition apparatus
EBARA CORP90 citations97
US6419462B1Jul 16, 2002
Positive displacement type liquid-delivery apparatus
EBARA CORP169 citations96
US6116267ASep 12, 2000
Valving device
EBARA CORP29 citations92
US6022413AFeb 8, 2000
Thin-film vapor deposition apparatus
EBARA CORP40 citations92
US5950646ASep 14, 1999
Vapor feed supply system
EBARA CORP23 citations92
US8742344B2Jun 3, 2014
Inspection apparatus
EBARA CORP10 citations84
US10157722B2Dec 18, 2018
Inspection device
EBARA CORP3 citations73
US9601302B2Mar 21, 2017
Inspection apparatus
EBARA CORP5 citations73
US9134261B2Sep 15, 2015
Inspection apparatus
EBARA CORP4 citations73
US9852878B2Dec 26, 2017
Surface processing apparatus
EBARA CORP0 citations52
US8946629B2Feb 3, 2015
Inspection apparatus
EBARA CORP1 citations52
US9105444B2Aug 11, 2015
Electro-optical inspection apparatus and method with dust or particle collection function
EBARA CORP0 citations51
US10446404B2Oct 15, 2019
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus
EBARA CORP0 citations41