Inventor
FLECHA EDWIN
US11 patents
Patents
11 patentsUS6169281B1Jan 2, 2001
Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions
IBM85 citations95
US6079254AJun 27, 2000
Scanning force microscope with automatic surface engagement and improved amplitude demodulation
IBM46 citations95
US6318159B1Nov 20, 2001
Scanning force microscope with automatic surface engagement
IBM22 citations92
US6220084B1Apr 24, 2001
Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope
IBM26 citations92
US5918274AJun 29, 1999
Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope
IBM30 citations92
US5902928AMay 11, 1999
Controlling engagement of a scanning microscope probe with a segmented piezoelectric actuator
IBM41 citations92
US5801381ASep 1, 1998
Method for protecting a probe tip using active lateral scanning control
IBM29 citations91
US5773824AJun 30, 1998
Method for improving measurement accuracy using active lateral scanning control of a probe
IBM20 citations88
US6234009B1May 22, 2001
Controlling motion of a scanning force microscope probe tip moving into engagement with a sample surface
IBM6 citations73
US6167753B1Jan 2, 2001
Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope
IBM13 citations73
US5432460AJul 11, 1995
Apparatus and method for opens and shorts testing of a circuit board
IBM18 citations70