Inventor
PAN JUDON TONY
US6 patents
⚠️ This page may combine multiple inventors who share the name “PAN JUDON TONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6296548B1Oct 2, 2001
Method and apparatus for optical monitoring in chemical mechanical polishing
APPLIED MATERIALS INC132 citations98
US6280289B1Aug 28, 2001
Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
APPLIED MATERIALS INC187 citations98
US6652355B2Nov 25, 2003
Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
APPLIED MATERIALS INC44 citations95
US6913511B2Jul 5, 2005
Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
APPLIED MATERIALS INC9 citations73
US6659842B2Dec 9, 2003
Method and apparatus for optical monitoring in chemical mechanical polishing
APPLIED MATERIALS INC10 citations70