Inventor
FURKAY STEPHEN SCOTT
US5 patents
Patents
5 patentsUS6097068AAug 1, 2000
Semiconductor device fabrication method and apparatus using connecting implants
IBM31 citations91
US5896303AApr 20, 1999
Discretization technique for multi-dimensional semiconductor device simulation
IBM18 citations82
US6057184AMay 2, 2000
Semiconductor device fabrication method using connecting implants
IBM10 citations72
US6486510B2Nov 26, 2002
Reduction of reverse short channel effects by implantation of neutral dopants
IBM9 citations71
US6352912B1Mar 5, 2002
Reduction of reverse short channel effects by deep implantation of neutral dopants
IBM8 citations71