Inventor

YAO TZE-JUNG

US2 patents

Patents

2 patents

US6787968B2Sep 7, 2004

Freestanding polymer MEMS structures with anti stiction

CALIFORNIA INST OF TECHN16 citations82

US6698798B2Mar 2, 2004

Micromachined rubber O-ring microfluidic couplers

CALIFORNIA INST OF TECHN13 citations80