Inventor
KWONG RANEE
US5 patents
⚠️ This page may combine multiple inventors who share the name “KWONG RANEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS6420088B1Jul 16, 2002
Antireflective silicon-containing compositions as hardmask layer
IBM214 citations98
US6503692B2Jan 7, 2003
Antireflective silicon-containing compositions as hardmask layer
IBM85 citations97
US6420084B1Jul 16, 2002
Mask-making using resist having SIO bond-containing polymer
IBM83 citations97
US6770418B2Aug 3, 2004
Positive resist compositions containing non-polymeric silicon
IBM1 citations51