Inventor
TOKUDA NORIAKI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “TOKUDA NORIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
9 patentsUS5995263ANov 30, 1999
Projection exposure apparatus
NIKON CORP39 citations96
US5812242ASep 22, 1998
Projection exposure apparatus including a temperature control system for the lens elements of the optical system
NIKON CORP53 citations95
US5685895ANov 11, 1997
Air cleaning apparatus used for an exposure apparatus
NIKON CORP82 citations95
US6090510AJul 18, 2000
Method for scanning exposure
NIKON CORP21 citations92
US5363172ANov 8, 1994
Method of projection exposure and stepper
NIKON CORP25 citations92
US6888621B2May 3, 2005
Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method
NIKON CORP32 citations91
US6388734B1May 14, 2002
Projection exposure apparatus
NIKON CORP8 citations74
US5608456AMar 4, 1997
Image sensor used with substantially monochromatic illuminating light of high coherence for preventing or reducing interference fringes
NIKON CORP11 citations73
US6803992B2Oct 12, 2004
Projection exposure apparatus
NIKON CORP4 citations63
NISSIN ELECTRIC CO LTD
3 patentsUS6545885B2Apr 8, 2003
Isolated operation prevention device for distributed power supply and interharmonic detection method
NISSIN ELECTRIC CO LTD28 citations89
US6147845ANov 14, 2000
System interconnection device and method of designing same
NISSIN ELECTRIC CO LTD13 citations70
US6335851B1Jan 1, 2002
Current-limiting device
NISSIN ELECTRIC CO LTD9 citations69