Inventor
NARUSHIMA HIROAKI
JP3 patents
Patents
3 patentsUS6888621B2May 3, 2005
Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method
NIKON CORP32 citations91
US6583597B2Jun 24, 2003
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same
NIKON CORP32 citations91
US6549277B1Apr 15, 2003
Illuminance meter, illuminance measuring method and exposure apparatus
NIKON CORP31 citations90