Inventor

SHA LIN

JP5 patents

⚠️ This page may combine multiple inventors who share the name “SHA LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US6845292B2Jan 18, 2005

Transfer apparatus and method for semiconductor process and semiconductor processing system

TOKYO ELECTRON LTD27 citations90

US7029505B2Apr 18, 2006

Sheet type heat treating apparatus and method for processing semiconductors

TOKYO ELECTRON LTD7 citations69

INTEL CORP

2 patents

US7927959B2Apr 19, 2011

Method of patterning a metal on a vertical sidewall of an excavated feature, method of forming an embedded MIM capacitor using same, and embedded memory device produced thereby

INTEL CORP3 citations61

US9224794B2Dec 29, 2015

Embedded memory device having MIM capacitor formed in excavated structure

INTEL CORP1 citations60

KEATING STEVEN J

1 patent

US8441057B2May 14, 2013

Embedded memory device having MIM capacitor formed in excavated structure

KEATING STEVEN J1 citations44