Inventor

YONEDA KATSUMI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “YONEDA KATSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RENESAS TECH CORP

1 patent

US7056825B2Jun 6, 2006

Method for manufacturing a semiconductor device that includes plasma treating an insulating film with a mixture of helium and argon gases

RENESAS TECH CORP3 citations59

NIPPON LASER DENSHI KK

1 patent

US5855682AJan 5, 1999

Plasma thin-film forming apparatus

NIPPON LASER DENSHI KK2 citations52

TOSHIBA KK

1 patent

US7084077B2Aug 1, 2006

Method of fabricating multilayer interconnect wiring structure having low dielectric constant insulator film with enhanced adhesivity

TOSHIBA KK1 citations48