Inventor
JURGENSEN HOLGER
DE6 patents
⚠️ This page may combine multiple inventors who share the name “JURGENSEN HOLGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIXTRON AG
5 patentsUS7128786B2Oct 31, 2006
Process for depositing III-V semiconductor layers on a non-III-V substrate
AIXTRON AG25 citations90
US7033921B2Apr 25, 2006
Method and device for depositing crystalline layers on crystalline substrates
AIXTRON AG31 citations90
US7524532B2Apr 28, 2009
Process for depositing thin layers on a substrate in a process chamber of adjustable height
AIXTRON AG18 citations82
US7201942B2Apr 10, 2007
Coating method
AIXTRON AG17 citations80
US7056388B2Jun 6, 2006
Reaction chamber with at least one HF feedthrough
AIXTRON AG4 citations58