Inventor
KOLIOPOULOS CHRIS L
US6 patents
⚠️ This page may combine multiple inventors who share the name “KOLIOPOULOS CHRIS L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS7557910B2Jul 7, 2009
System and method for controlling a beam source in a workpiece surface inspection system
KLA TENCOR CORP6 citations78
US7839495B2Nov 23, 2010
System and method for controlling a beam source in a workpiece surface inspection system
KLA TENCOR CORP3 citations70
US7541826B2Jun 2, 2009
Compliant pad wafer chuck
KLA TENCOR CORP5 citations53