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Inventor

LINDLEY ROGER A

US7 patents
⚠️ This page may combine multiple inventors who share the name “LINDLEY ROGER A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents
US5989349ANov 23, 1999

Diagnostic pedestal assembly for a semiconductor wafer processing system

APPLIED MATERIALS INC36 citations91
US7972469B2Jul 5, 2011

Plasma processing apparatus

APPLIED MATERIALS INC7 citations84
US8048328B2Nov 1, 2011

Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor

APPLIED MATERIALS INC7 citations80
US7883633B2Feb 8, 2011

Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor

APPLIED MATERIALS INC3 citations59

APPLLIED MATERIALS INC

1 patent
US6326307B1Dec 4, 2001

Plasma pretreatment of photoresist in an oxide etch process

APPLLIED MATERIALS INC201 citations95

HOFFMAN DANIEL J

1 patent
US8617351B2Dec 31, 2013

Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction

HOFFMAN DANIEL J26 citations90

SHANNON STEVEN C

1 patent
US8092605B2Jan 10, 2012

Magnetic confinement of a plasma

SHANNON STEVEN C37 citations90