Inventor

RATHSACK BENJAMIN M

US3 patents

⚠️ This page may combine multiple inventors who share the name “RATHSACK BENJAMIN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CARCASI MICHAEL A

2 patents

US8435728B2May 7, 2013

Method of slimming radiation-sensitive material lines in lithographic applications

CARCASI MICHAEL A2 citations58

US8338086B2Dec 25, 2012

Method of slimming radiation-sensitive material lines in lithographic applications

CARCASI MICHAEL A3 citations58

RATHSACK BENJAMIN M

1 patent

US8449293B2May 28, 2013

Substrate treatment to reduce pattern roughness

RATHSACK BENJAMIN M3 citations54