Inventor
AUGUSTINO JASON
US16 patents
⚠️ This page may combine multiple inventors who share the name “AUGUSTINO JASON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS7854820B2Dec 21, 2010
Upper electrode backing member with particle reducing features
LAM RES CORP38 citations91
US7942973B2May 17, 2011
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses
LAM RES CORP9 citations83
US7767028B2Aug 3, 2010
Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses
LAM RES CORP20 citations77
US9484243B2Nov 1, 2016
Processing chamber with features from side wall
LAM RES CORP2 citations59
US10153136B2Dec 11, 2018
Hollow RF feed with coaxial DC power feed
LAM RES CORP1 citations52
US9093483B2Jul 28, 2015
Showerhead electrode assembly with gas flow modification for extended electrode life
LAM RES CORP0 citations51
US10812033B2Oct 20, 2020
High-power radio-frequency spiral-coil filter
LAM RES CORP0 citations36
AUGUSTINO JASON
5 patentsUS8171877B2May 8, 2012
Backside mounted electrode carriers and assemblies incorporating the same
AUGUSTINO JASON8 citations83
US8702866B2Apr 22, 2014
Showerhead electrode assembly with gas flow modification for extended electrode life
AUGUSTINO JASON10 citations82
US9412555B2Aug 9, 2016
Lower electrode assembly of plasma processing chamber
AUGUSTINO JASON17 citations79
US8276604B2Oct 2, 2012
Peripherally engaging electrode carriers and assemblies incorporating the same
AUGUSTINO JASON4 citations61
US8603292B2Dec 10, 2013
Quartz window for a degas chamber
AUGUSTINO JASON3 citations53