Inventor
TOBISAKA YUJI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TOBISAKA YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
8 patentsUS8030176B2Oct 4, 2011
Method for preparing substrate having monocrystalline film
SHINETSU CHEMICAL CO10 citations84
US9741603B2Aug 22, 2017
Method for producing hybrid substrate, and hybrid substrate
SHINETSU CHEMICAL CO2 citations72
US7749870B2Jul 6, 2010
Method for producing SOI substrate
SHINETSU CHEMICAL CO6 citations63
US8772132B2Jul 8, 2014
Method of manufacturing laminated wafer by high temperature laminating method
SHINETSU CHEMICAL CO0 citations52
US8357586B2Jan 22, 2013
Method for manufacturing SOI wafer
SHINETSU CHEMICAL CO1 citations52
US10103021B2Oct 16, 2018
Thermally oxidized heterogeneous composite substrate and method for manufacturing same
SHINETSU CHEMICAL CO0 citations50
US9214379B2Dec 15, 2015
SOS substrate having low defect density in vicinity of interface
SHINETSU CHEMICAL CO0 citations41
US9214380B2Dec 15, 2015
SOS substrate having low surface defect density
SHINETSU CHEMICAL CO0 citations41
AKIYAMA SHOJI
3 patentsUS8551862B2Oct 8, 2013
Method of manufacturing laminated wafer by high temperature laminating method
AKIYAMA SHOJI3 citations62
US8138064B2Mar 20, 2012
Method for producing silicon film-transferred insulator wafer
AKIYAMA SHOJI3 citations62
US8420503B2Apr 16, 2013
Method for producing SOI substrate
AKIYAMA SHOJI0 citations41