Inventor
NAGASHIMA HIROMICHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “NAGASHIMA HIROMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUKUTOMI YOSHITERU
4 patentsUS8851008B2Oct 7, 2014
Parallel substrate treatment for a plurality of substrate treatment lines
FUKUTOMI YOSHITERU24 citations92
US9230834B2Jan 5, 2016
Substrate treating apparatus
FUKUTOMI YOSHITERU4 citations83
US9165807B2Oct 20, 2015
Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units
FUKUTOMI YOSHITERU10 citations83
US9174235B2Nov 3, 2015
Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines
FUKUTOMI YOSHITERU3 citations62
OGURA HIROYUKI
3 patentsUS9184071B2Nov 10, 2015
Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units
OGURA HIROYUKI17 citations92
US8545118B2Oct 1, 2013
Substrate treating apparatus with inter-unit buffers
OGURA HIROYUKI25 citations92
US9299596B2Mar 29, 2016
Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates
OGURA HIROYUKI2 citations62
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD
3 patentsUS10290521B2May 14, 2019
Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD1 citations72
US9687874B2Jun 27, 2017
Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD2 citations72
US12217986B2Feb 4, 2025
Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substrates
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD1 citations63