Inventor
VAN ZWET ERWIN JOHN
NL20 patents
⚠️ This page may combine multiple inventors who share the name “VAN ZWET ERWIN JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TNO
6 patentsUS11343001B2May 24, 2022
Photon exchange based quantum network and method of operating such a network
TNO4 citations65
US10224685B2Mar 5, 2019
Multi-beam laser system
TNO1 citations50
US10114289B2Oct 30, 2018
Exposure head, exposure apparatus and method of operating an exposure head
TNO1 citations48
US10014165B2Jul 3, 2018
Radiation sensor device for high energy photons
TNO0 citations47
US10761315B2Sep 1, 2020
High power adaptive mirror
TNO0 citations40
US10712674B2Jul 14, 2020
Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby
TNO0 citations38
ASML NETHERLANDS BV
5 patentsUS9335638B2May 10, 2016
Lithographic apparatus, programmable patterning device and lithographic method
ASML NETHERLANDS BV19 citations92
US10928736B2Feb 23, 2021
Method and apparatus for direct write maskless lithography
ASML NETHERLANDS BV2 citations68
US11953835B2Apr 9, 2024
Methods and systems for maskless lithography
ASML NETHERLANDS BV0 citations51
US9372412B2Jun 21, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
US9715183B2Jul 25, 2017
Device, lithographic apparatus, method for guiding radiation and device manufacturing method
ASML NETHERLANDS BV0 citations45
VAN ZWET ERWIN JOHN
4 patentsUS9316926B2Apr 19, 2016
Lithographic apparatus and device manufacturing method
VAN ZWET ERWIN JOHN1 citations47
US9235140B2Jan 12, 2016
Lithographic apparatus and device manufacturing method
VAN ZWET ERWIN JOHN0 citations47
US9134630B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
VAN ZWET ERWIN JOHN1 citations47
US8925186B2Jan 6, 2015
System and method for picking and placement of chip dies
VAN ZWET ERWIN JOHN0 citations33