Inventor
MEIJERINK MARCUS GERHARDUS HENDRIKUS
NL6 patents
⚠️ This page may combine multiple inventors who share the name “MEIJERINK MARCUS GERHARDUS HENDRIKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7671347B2Mar 2, 2010
Cleaning method, apparatus and cleaning system
ASML NETHERLANDS BV6 citations62
US7714986B2May 11, 2010
Laser beam conditioning system comprising multiple optical paths allowing for dose control
ASML NETHERLANDS BV2 citations61
US7826037B2Nov 2, 2010
Radiation beam pulse trimming
ASML NETHERLANDS BV0 citations46
ZEISS CARL SMT GMBH
2 patentsUS8382301B2Feb 26, 2013
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination
ZEISS CARL SMT GMBH18 citations91
US8585224B2Nov 19, 2013
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination
ZEISS CARL SMT GMBH11 citations82