Inventor
KATANO MAKIKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KATANO MAKIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS6284020B1Sep 4, 2001
Method of maintaining cleanliness of substrates and box for accommodating substrates
TOSHIBA KK32 citations90
US7232763B2Jun 19, 2007
Method of manufacturing semiconductor device
TOSHIBA KK5 citations62
US7889313B2Feb 15, 2011
Immersion lithography apparatus and exposure method
TOSHIBA KK2 citations60
US9734985B2Aug 15, 2017
Analytical apparatus, sample holder and analytical method
TOSHIBA KK0 citations47