Inventor

DOENCH JOSEPH P

US2 patents

Patents

2 patents

US9314854B2Apr 19, 2016

Ductile mode drilling methods for brittle components of plasma processing apparatuses

LAM RES CORP10 citations77

US9892920B1Feb 13, 2018

Low stress bonding of silicon or germanium parts

LAM RES CORP1 citations48