Inventor
BETTENCOURT GREGORY R
US10 patents
⚠️ This page may combine multiple inventors who share the name “BETTENCOURT GREGORY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BETTENCOURT GREGORY R
3 patentsUS8419959B2Apr 16, 2013
Clamped monolithic showerhead electrode
BETTENCOURT GREGORY R482 citations96
US8272346B2Sep 25, 2012
Gasket with positioning feature for clamped monolithic showerhead electrode
BETTENCOURT GREGORY R171 citations95
US8536071B2Sep 17, 2013
Gasket with positioning feature for clamped monolithic showerhead electrode
BETTENCOURT GREGORY R10 citations80
LAM RES CORP
3 patentsUS8796153B2Aug 5, 2014
Clamped monolithic showerhead electrode
LAM RES CORP7 citations84
US7226055B1Jun 5, 2007
Substrate holding and spinning assembly and methods for making the same
LAM RES CORP20 citations81
US9314854B2Apr 19, 2016
Ductile mode drilling methods for brittle components of plasma processing apparatuses
LAM RES CORP10 citations77