Inventor
SHIBUE HIROAKI
JP9 patents
Patents
9 patentsUS10933507B2Mar 2, 2021
Polishing apparatus
EBARA CORP2 citations72
US9437507B2Sep 6, 2016
Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor
EBARA CORP3 citations72
US12083646B2Sep 10, 2024
Polishing apparatus, polishing method and method for outputting visualization information of film thickness distribution on substrate
EBARA CORP1 citations61
US12123714B2Oct 22, 2024
Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor
EBARA CORP0 citations60
US11852472B2Dec 26, 2023
Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor
EBARA CORP0 citations60
US11759912B2Sep 19, 2023
Magnetic element and eddy current sensor using the same
EBARA CORP0 citations51
US12241738B2Mar 4, 2025
Detection signal processing apparatus and detection signal processing method for eddy current sensor
EBARA CORP0 citations50
US12179310B2Dec 31, 2024
Output signal processing apparatus for eddy current sensor
EBARA CORP0 citations50
US11731233B2Aug 22, 2023
Eddy current detection device and polishing apparatus
EBARA CORP0 citations48