Inventor

KARUPPIAH LAKSH

US2 patents

⚠️ This page may combine multiple inventors who share the name “KARUPPIAH LAKSH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US9496190B2Nov 15, 2016

Feedback of layer thickness timing and clearance timing for polishing control

APPLIED MATERIALS INC1 citations51

XU KUN

1 patent

US8989890B2Mar 24, 2015

GST film thickness monitoring

XU KUN1 citations50