Inventor
LUIJTEN CARLO CORNELIS MARIA
NL14 patents
⚠️ This page may combine multiple inventors who share the name “LUIJTEN CARLO CORNELIS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS6842247B1Jan 11, 2005
Reticle independent reticle stage calibration
ASML NETHERLANDS BV17 citations79
US7808614B2Oct 5, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations72
US9494879B2Nov 15, 2016
Contamination trap for a lithographic apparatus
ASML NETHERLANDS BV3 citations71
US10649342B2May 12, 2020
Method and apparatus for determining a fingerprint of a performance parameter
ASML NETHERLANDS BV2 citations69
US9625835B2Apr 18, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations69
US9606445B2Mar 28, 2017
Lithographic apparatus and method of manufacturing a device
ASML NETHERLANDS BV5 citations68
US10571812B2Feb 25, 2020
Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations66
US7522261B2Apr 21, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7130019B2Oct 31, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations60
US11194258B2Dec 7, 2021
Method and apparatus for determining a fingerprint of a performance parameter
ASML NETHERLANDS BV0 citations59
US10001710B2Jun 19, 2018
Inspection apparatus, inspection method, lithographic apparatus and manufacturing method
ASML NETHERLANDS BV0 citations51
US11054754B2Jul 6, 2021
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations48
US9823590B2Nov 21, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48