Inventor

LEE KUNTACK

KR48 patents

⚠️ This page may combine multiple inventors who share the name “LEE KUNTACK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE KUNTACK

SAMSUNG ELECTRONICS CO LTD

Apparatus and methods for treating a substrate

Method for treating substrate

Process chamber and substrate processing apparatus including the same

Manufacturing method and fluid supply system for treating substrate

Substrate treating apparatus

Apparatus and methods for manufacturing semiconductor devices and treating substrates

Manufacturing method and fluid supply system for treating substrate

Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate

Substrate treating apparatus and method of treating substrate

Etching composition

Apparatus and methods for treating a substrate

Substrate-cleaning apparatus having tiltable roll brush

Process chamber and substrate processing apparatus including the same

Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method

Apparatus and method for drying substrate

Substrate processing method, micropattern forming method, and substrate processing apparatus

Apparatus for processing a substrate

Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method

Substrate transferring unit, substrate processing apparatus, and substrate processing method

Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus

Substrate transferring unit, substrate processing apparatus, and substrate processing method

Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus

Rotary body module and chemical mechanical polishing apparatus having the same

Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid

Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid

Thin film formation apparatus and method using plasma

Wafer drying apparatus, wafer processing system including the same, and wafer processing method using the same

Substrate processing method using low temperature developer and semiconductor device manufacturing apparatus using the same

Substrate processing apparatus and substrate processing method

Substrate heating apparatus and method for processing a substrate

Apparatus for drying wafer and method for drying wafer

Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system

Substrate rotating apparatus, substrate processing system including the same, and substrate processing method using the same

Substrate treating apparatus

Etching composition and method of manufacturing semiconductor device using the same

Method of forming pattern structure

Apparatus and a method for treating a substrate

Substrate cleaning apparatus and substrate cleaning method using the same

Method and apparatus for purifying cleaning agent

LEE HYOSAN

Method of fabricating nonvolatile memory device

Metal etchant compositions and methods of fabricating a semiconductor device using the same

KIM YOUNG-HOO

Non-volatile memory device and method for fabricating non-volatile memory device

Methods of manufacturing a three-dimensional semiconductor device

SEMES CO LTD

Substrate processing method and substrate processing system

Substrate processing apparatus and substrate processing method

CHO YONG-JHIN

Substrate treatment systems using supercritical fluid

HOLSTEYNS FRANK

Method and apparatus for controlled transient cavitation

KIM YOUNGOK

Wafer test method and wafer test apparatus