Inventor
KIKUIRI NOBUTAKA
JP43 patents
⚠️ This page may combine multiple inventors who share the name “KIKUIRI NOBUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
24 patentsUS10572995B2Feb 25, 2020
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC13 citations86
US10281415B2May 7, 2019
Pattern inspection method and pattern inspection apparatus
NUFLARE TECHNOLOGY INC9 citations84
US9869650B2Jan 16, 2018
Pattern inspection apparatus
NUFLARE TECHNOLOGY INC7 citations84
US10777384B2Sep 15, 2020
Multiple beam image acquisition apparatus and multiple beam image acquisition method
NUFLARE TECHNOLOGY INC3 citations73
US10629406B2Apr 21, 2020
Optical system adjustment method of image acquisition apparatus
NUFLARE TECHNOLOGY INC3 citations73
US10026011B2Jul 17, 2018
Mask inspection apparatus, mask evaluation method and mask evaluation system
NUFLARE TECHNOLOGY INC6 citations73
US9728373B2Aug 8, 2017
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC4 citations73
US9575010B2Feb 21, 2017
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC6 citations73
US9196033B2Nov 24, 2015
Inspection sensitivity evaluation method
NUFLARE TECHNOLOGY INC4 citations73
US8861832B2Oct 14, 2014
Inspection system and method
NUFLARE TECHNOLOGY INC4 citations73
US9922415B2Mar 20, 2018
Inspection method, inspection apparatus, and inspection system
NUFLARE TECHNOLOGY INC6 citations71
US10504219B2Dec 10, 2019
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC1 citations63
US9086388B2Jul 21, 2015
Pattern evaluation method and apparatus
NUFLARE TECHNOLOGY INC2 citations63
US9165355B1Oct 20, 2015
Inspection method
NUFLARE TECHNOLOGY INC2 citations60
US9691143B2Jun 27, 2017
Inspection apparatus and inspection apparatus system
NUFLARE TECHNOLOGY INC1 citations52
US9235883B2Jan 12, 2016
Inspection system and method
NUFLARE TECHNOLOGY INC1 citations52
US10127648B2Nov 13, 2018
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC0 citations42
US10094791B2Oct 9, 2018
Pattern inspection apparatus
NUFLARE TECHNOLOGY INC0 citations42
US9811896B2Nov 7, 2017
Measuring apparatus
NUFLARE TECHNOLOGY INC0 citations42
US9659361B2May 23, 2017
Measuring apparatus that generates positional deviation distribution of a pattern on a target object
NUFLARE TECHNOLOGY INC0 citations42
US9626755B2Apr 18, 2017
Mask inspection apparatus and mask inspection method
NUFLARE TECHNOLOGY INC0 citations42
US9530202B2Dec 27, 2016
Inspection apparatus and inspection method
NUFLARE TECHNOLOGY INC0 citations42
US9116136B2Aug 25, 2015
Inspection method and system
NUFLARE TECHNOLOGY INC0 citations42
US9140654B2Sep 22, 2015
Inspection apparatus
NUFLARE TECHNOLOGY INC0 citations40
TOSHIBA KK
15 patentsUS5323712AJun 28, 1994
Table moving apparatus
TOSHIBA KK84 citations96
US5179863AJan 19, 1993
Method and apparatus for setting the gap distance between a mask and a wafer at a predetermined distance
TOSHIBA KK104 citations96
US7446813B2Nov 4, 2008
Active camera apparatus and robot apparatus
TOSHIBA KK33 citations92
US6907388B2Jun 14, 2005
Monitoring apparatus
TOSHIBA KK32 citations92
US5134640AJul 28, 1992
Synchrotron radiation apparatus
TOSHIBA KK22 citations92
US5825730AOct 20, 1998
Mastering machine having non-repetitive runout compensation
TOSHIBA KK27 citations88
US5130747AJul 14, 1992
Carrier apparatus
TOSHIBA KK18 citations82
US7264897B2Sep 4, 2007
Fuel cell system
TOSHIBA KK7 citations74
US6103177AAug 15, 2000
Mastering apparatus for recording onto a glass master and method for recording onto a glass master
TOSHIBA KK7 citations74
US5398271AMar 14, 1995
Exposure apparatus
TOSHIBA KK8 citations73
US7104114B2Sep 12, 2006
Electronic equipment and fuel cell for the same
TOSHIBA KK3 citations63
US7597982B2Oct 6, 2009
Fuel cell system with a gas supply pump that applies negative pressure to the anode and cathode
TOSHIBA KK3 citations62
US7225111B2May 29, 2007
Monitoring apparatus
TOSHIBA KK4 citations62
US5299251AMar 29, 1994
Exposure apparatus
TOSHIBA KK2 citations62
US7678481B2Mar 16, 2010
Fuel cell system with a fuel tank configured to store a fuel at a pressure higher than atmospheric pressure
TOSHIBA KK0 citations52