Inventor
SHIMIZU KUMIKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SHIMIZU KUMIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS10720306B2Jul 21, 2020
Charged particle beam device
HITACHI HIGH TECH CORP4 citations83
US10249474B2Apr 2, 2019
Charged particle beam device
HITACHI HIGH TECH CORP4 citations83
US9697987B2Jul 4, 2017
Charged particle beam device
HITACHI HIGH TECH CORP9 citations83
US9978558B2May 22, 2018
Scanning-electron-microscope image processing device and scanning method
HITACHI HIGH TECH CORP4 citations72
US9601307B2Mar 21, 2017
Charged particle radiation apparatus
HITACHI HIGH TECH CORP4 citations71
US11798780B2Oct 24, 2023
Charged particle beam device
HITACHI HIGH TECH CORP0 citations62
US11239052B2Feb 1, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations62
US10984981B2Apr 20, 2021
Charged particle beam device having inspection scan direction based on scan with smaller dose
HITACHI HIGH TECH CORP1 citations60
US10984980B2Apr 20, 2021
Charged particle beam device for imaging vias inside trenches
HITACHI HIGH TECH CORP1 citations60