Inventor
MIEHER WALTER
US5 patents
⚠️ This page may combine multiple inventors who share the name “MIEHER WALTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS7826071B2Nov 2, 2010
Parametric profiling using optical spectroscopic systems
KLA TENCOR CORP114 citations97
US9470639B1Oct 18, 2016
Optical metrology with reduced sensitivity to grating anomalies
KLA TENCOR CORP31 citations93
US10024654B2Jul 17, 2018
Method and system for determining in-plane distortions in a substrate
KLA TENCOR CORP11 citations80