Inventor
FRESQUET GILLES
FR12 patents
⚠️ This page may combine multiple inventors who share the name “FRESQUET GILLES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FOGALE NANOTECH
9 patentsUS9739600B1Aug 22, 2017
Chromatic confocal device and method for 2D/3D inspection of an object such as a wafer
FOGALE NANOTECH33 citations92
US9494529B1Nov 15, 2016
Chromatic confocal device and method for 2D/3D inspection of an object such as a wafer with variable spatial resolution
FOGALE NANOTECH22 citations91
US9958261B2May 1, 2018
Device and method for surface profilometry for the control of wafers during processing
FOGALE NANOTECH2 citations71
US11662199B2May 30, 2023
Method and device for measuring interfaces of an optical element
FOGALE NANOTECH2 citations67
US9897927B2Feb 20, 2018
Device and method for positioning a photolithography mask by a contactless optical method
FOGALE NANOTECH2 citations63
US10240977B2Mar 26, 2019
Method for 2D/3D inspection of an object such as a wafer
FOGALE NANOTECH1 citations61
US12163777B2Dec 10, 2024
Device and method for imaging and interferometry measurements
FOGALE NANOTECH0 citations50
US10074172B2Sep 11, 2018
Device and method for making dimensional measurements on multilayer objects such as wafers
FOGALE NANOTECH0 citations48
US10043266B2Aug 7, 2018
Method and device for controllably revealing structures buried in objects such as wafers
FOGALE NANOTECH0 citations48