Inventor
OYAMA TAKESHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “OYAMA TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS10573512B2Feb 25, 2020
Film forming method
TOKYO ELECTRON LTD2 citations72
US10151029B2Dec 11, 2018
Silicon nitride film forming method and silicon nitride film forming apparatus
TOKYO ELECTRON LTD4 citations72
US10438791B2Oct 8, 2019
Film forming method, film forming apparatus, and storage medium
TOKYO ELECTRON LTD2 citations71
US11414753B2Aug 16, 2022
Processing method
TOKYO ELECTRON LTD0 citations62
US11201053B2Dec 14, 2021
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US10714332B2Jul 14, 2020
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US12509766B2Dec 30, 2025
Film deposition method and film deposition apparatus
TOKYO ELECTRON LTD0 citations59
US12469694B2Nov 11, 2025
Film forming method
TOKYO ELECTRON LTD0 citations59
US11473194B2Oct 18, 2022
Cleaning method of deposition apparatus
TOKYO ELECTRON LTD0 citations51
US11171014B2Nov 9, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US9922820B2Mar 20, 2018
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations50
US11970768B2Apr 30, 2024
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations47
US10550470B2Feb 4, 2020
Film forming apparatus and operation method of film forming apparatus
TOKYO ELECTRON LTD0 citations40