Inventor
RAVENSBERGEN JANNEKE
NL8 patents
Patents
8 patentsUS10599047B2Mar 24, 2020
Metrology apparatus, lithographic system, and method of measuring a structure
ASML NETHERLANDS BV2 citations72
US11846867B2Dec 19, 2023
Hollow-core photonic crystal fiber based broadband radiation generator
ASML NETHERLANDS BV3 citations71
US10444640B2Oct 15, 2019
Metrology apparatus, lithographic system, and method of measuring a structure
ASML NETHERLANDS BV4 citations71
US12306433B2May 20, 2025
Hollow-core photonic crystal fiber based optical component for broadband radiation generation
ASML NETHERLANDS BV0 citations61
US11774671B2Oct 3, 2023
Hollow-core photonic crystal fiber based optical component for broadband radiation generation
ASML NETHERLANDS BV0 citations61
US12393095B2Aug 19, 2025
Hollow-core photonic crystal fiber based broadband radiation generator
ASML NETHERLANDS BV0 citations60
US10908514B2Feb 2, 2021
Metrology apparatus, lithographic system, and method of measuring a structure
ASML NETHERLANDS BV0 citations60
US12265229B2Apr 1, 2025
Method and apparatus for coherence scrambling in metrology applications
ASML NETHERLANDS BV0 citations59