Inventor
ZHOU ZILI
NL13 patents
Patents
13 patentsUS11385553B2Jul 12, 2022
Metrology method, patterning device, apparatus and computer program
ASML NETHERLANDS BV2 citations72
US10996570B2May 4, 2021
Metrology method, patterning device, apparatus and computer program
ASML NETHERLANDS BV2 citations72
US10747124B2Aug 18, 2020
Method of measuring a target, metrology apparatus, polarizer assembly
ASML NETHERLANDS BV2 citations72
US10599047B2Mar 24, 2020
Metrology apparatus, lithographic system, and method of measuring a structure
ASML NETHERLANDS BV2 citations72
US10191391B2Jan 29, 2019
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV4 citations72
US10983445B2Apr 20, 2021
Method and apparatus for measuring a parameter of interest using image plane detection techniques
ASML NETHERLANDS BV3 citations71
US10795269B2Oct 6, 2020
Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method
ASML NETHERLANDS BV3 citations70
US10353298B2Jul 16, 2019
Method of measuring a target, metrology apparatus, polarizer assembly
ASML NETHERLANDS BV1 citations62
US11042100B2Jun 22, 2021
Measurement apparatus and method of measuring a target
ASML NETHERLANDS BV0 citations60
US12265229B2Apr 1, 2025
Method and apparatus for coherence scrambling in metrology applications
ASML NETHERLANDS BV0 citations59
US10423077B2Sep 24, 2019
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV0 citations51
US12326669B2Jun 10, 2025
Illumination apparatus and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV0 citations50
US12209994B2Jan 28, 2025
Method and metrology tool for determining information about a target structure, and cantilever probe
ASML NETHERLANDS BV0 citations44