Inventor
CHENG WEI-SHIN
TW20 patents
Patents
20 patentsUS11553581B2Jan 10, 2023
Radiation source apparatus and method for using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11533799B1Dec 20, 2022
System and method for supplying target material in an EUV light source
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11470710B2Oct 11, 2022
EUV light source and apparatus for EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10880980B2Dec 29, 2020
EUV light source and apparatus for EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10670970B1Jun 2, 2020
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11809083B2Nov 7, 2023
EUV photolithography system fuel source and methods of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12372880B2Jul 29, 2025
System and method for detecting debris in a photolithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12096543B2Sep 17, 2024
Method for using radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12028959B2Jul 2, 2024
EUV light source and apparatus for EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11576250B1Feb 7, 2023
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11537053B2Dec 27, 2022
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11134558B2Sep 28, 2021
Droplet generator assembly and method for using the same and radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11086225B2Aug 10, 2021
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12235586B2Feb 25, 2025
EUV photolithography system fuel source and methods of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12167526B2Dec 10, 2024
Method and system for generating droplets for EUV photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12066761B2Aug 20, 2024
Inspection tool for an extreme ultraviolet radiation source to observe tin residual
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11528797B2Dec 13, 2022
Method and system for generating droplets for EUV photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11442365B1Sep 13, 2022
EUV photolithography system and methods of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12572080B2Mar 10, 2026
Lithography system and methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12063734B2Aug 13, 2024
Droplet generator assembly and method of replacing components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50