Inventor
NAKIBOGLU GÜNES
NL14 patents
Patents
14 patentsUS10241422B2Mar 26, 2019
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV2 citations71
US10222713B2Mar 5, 2019
Patterning device cooling apparatus
ASML NETHERLANDS BV2 citations71
US9939740B2Apr 10, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations71
US10895808B2Jan 19, 2021
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV2 citations70
US10990025B2Apr 27, 2021
Patterning device cooling apparatus
ASML NETHERLANDS BV0 citations61
US11579533B2Feb 14, 2023
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations60
US10495985B2Dec 3, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations58
US10317804B2Jun 11, 2019
Substrate table, lithographic apparatus and method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10114295B2Oct 30, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US10571810B2Feb 25, 2020
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations47
US10345717B2Jul 9, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations47
US9977348B2May 22, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations47
US10114299B2Oct 30, 2018
Lithographic apparatus
ASML NETHERLANDS BV0 citations46
US10133197B2Nov 20, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36