Inventor
SCHOLTEN BERT DIRK
NL10 patents
⚠️ This page may combine multiple inventors who share the name “SCHOLTEN BERT DIRK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS10895808B2Jan 19, 2021
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV2 citations70
US11664264B2May 30, 2023
Lithographic apparatus, method for unloading a substrate and method for loading a substrate
ASML NETHERLANDS BV2 citations66
US11579533B2Feb 14, 2023
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations60
US11269259B2Mar 8, 2022
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations59
US12287586B2Apr 29, 2025
Stage system, lithographic apparatus, method for positioning and device manufacturing method
ASML NETHERLANDS BV0 citations55
US11860552B2Jan 2, 2024
Stage system, lithographic apparatus, method for positioning and device manufacturing method
ASML NETHERLANDS BV1 citations55
US10871715B2Dec 22, 2020
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations48
US10534270B2Jan 14, 2020
Lithography apparatus, a method of manufacturing a device and a control program
ASML NETHERLANDS BV0 citations46
US10261422B2Apr 16, 2019
Lithography apparatus and method of manufacturing a device
ASML NETHERLANDS BV0 citations46