Inventor
VAN SOMMEREN DAAN DANIEL JOHANNES ANTONIUS
NL10 patents
Patents
10 patentsUS9798253B2Oct 24, 2017
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US10895808B2Jan 19, 2021
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV2 citations70
US10216100B2Feb 26, 2019
Inspection substrate and an inspection method
ASML NETHERLANDS BV2 citations69
US11579533B2Feb 14, 2023
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations60
US10948825B2Mar 16, 2021
Method for removing photosensitive material on a substrate
ASML NETHERLANDS BV1 citations57
US10725390B2Jul 28, 2020
Inspection substrate and an inspection method
ASML NETHERLANDS BV0 citations48
US10317804B2Jun 11, 2019
Substrate table, lithographic apparatus and method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10571810B2Feb 25, 2020
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations47
US11762304B2Sep 19, 2023
Lithographic apparatus
ASML NETHERLANDS BV0 citations44
US10120290B2Nov 6, 2018
Fluid handling structure, immersion lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV0 citations27