Inventor
AIBARA MEITOKU
JP13 patents
Patents
13 patentsUS9953826B2Apr 24, 2018
Substrate cleaning method, substrate cleaning system, and memory medium
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Substrate processing system, substrate cleaning method, and recording medium
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US11367630B2Jun 21, 2022
Substrate cleaning method, substrate cleaning system, and memory medium
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US10811283B2Oct 20, 2020
Substrate cleaning method, substrate cleaning system, and memory medium
TOKYO ELECTRON LTD2 citations72
US10734255B2Aug 4, 2020
Substrate cleaning method, substrate cleaning system and memory medium
TOKYO ELECTRON LTD6 citations72
US10121646B2Nov 6, 2018
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD2 citations72
US9818598B2Nov 14, 2017
Substrate cleaning method and recording medium
TOKYO ELECTRON LTD4 citations72
US10792711B2Oct 6, 2020
Substrate processing system, substrate cleaning method, and recording medium
TOKYO ELECTRON LTD1 citations62
US11600499B2Mar 7, 2023
Substrate cleaning method, substrate cleaning system, and storage medium
TOKYO ELECTRON LTD0 citations61
US11551941B2Jan 10, 2023
Substrate cleaning method
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US9870914B2Jan 16, 2018
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD1 citations51
US9768039B2Sep 19, 2017
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations51
US9764345B2Sep 19, 2017
Substrate processing apparatus and nozzle cleaning method
TOKYO ELECTRON LTD0 citations41