Inventor
WATANUKI KOHEI
JP2 patents
Patents
2 patentsUS8573151B2Nov 5, 2013
Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window
OHMI TADAHIRO3 citations61
US8188468B2May 29, 2012
Compound-type thin film, method of forming the same, and electronic device using the same
OHMI TADAHIRO3 citations58